Foreign matter inspecting apparatus and foreign matter inspecting method

異物検査装置および異物検査方法

Abstract

【課題】反射光やパターンからの散乱光を低減でき、異物の検出精度を高くすることができ、しかも、各機器の配置調整が容易であり、かつ、装置の構造を簡単にできる異物検査装置および異物検査方法を提供する。 【解決手段】シート状部材Sの表面に存在する異物PMを検出する検出装置であって、シート状部材Sに対して光Lを出射する光源11と、シート状部材Sの表面と対向する位置に光検出部12aが設けられた光検出手段12と、光検出手段12が検出した光Lに関する情報を解析し、シート状部材Sの表面上における異物PMの有無を判断する判断手段13とからなり、光源11は、シート状部材Sの表面と平行な光軸を有する光Lを、シート状部材Sの表面に沿って出射するものである。光Lはシート状部材Sの表面と平行な光軸を有するので、シート状部材Sの表面での反射を抑えることができ、異物PMの検出精度を高くすることができる。 【選択図】図1
<P>PROBLEM TO BE SOLVED: To provide a foreign matter inspecting apparatus and a foreign matter inspecting method, capable of reducing reflection light and scattering light from a pattern, improving detection accuracy of a foreign matter, arranging/adjusting respective devices easily, and making the structure of the apparatus simple. <P>SOLUTION: The foreign matter inspecting apparatus which detects the foreign matter PM existing on the surface of a sheet-like member S, comprises: a light source 11 for emitting light L to the sheet-like member S; a light detecting means 12 whose light detecting section 12a is disposed on a position opposite to the surface of the sheet-like member S; and a judging means 13 which analyzes information about the light L detected by the light detecting means 12 and judges as to whether or not the foreign matter PM exists on the surface of the sheet-like member S. The light source 11 emits the light L whose optical axis is parallel to the surface of the sheet-like member S, along the surface of the sheet-like member S. Since the optical axis of the light L is parallel to the surface of the sheet-like member S, reflection on the surface of the sheet-like member S can be suppressed, and the detection accuracy of the foreign matter PM can be improved. <P>COPYRIGHT: (C)2007,JPO&INPIT

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