ガラス基板の形状測定装置および測定方法

Shape measuring device and measuring method of glass substrate

Abstract

【課題】大寸法の液晶基板やプラズマディスプレイ基板等の表示ディスプレイ基板に用いる方形のガラス基板の縦横の寸法、四隅の直角度等の形状測定装置および測定方法に関する。 【解決手段】ガラス基板を傾斜姿勢にして支持するガラス検査台上で、該ガラス基板面を照射する光源と該光源によって照射された領域を撮像するカメラとからなる撮像手段と、該撮像手段を有するヘッドをXY軸両方向に移動自在とするヘッド移動手段と、該ヘッドのXY座標を検出自在なヘッド位置検出手段と、カメラで撮像したガラス基板周辺エッジ部の画像を処理する画像処理装置と、前記ヘッド位置検出手段によるXY軸の位置情報、該画像処理装置によって算出したガラス基板の複数箇所の周辺エッジ位置座標情報により、ガラス基板の寸法と四隅の直角度、またはガラス基板の寸法と四隅の直角度に加えて孔位置および/又は孔径を演算測定する演算処理装置とからなる。 【選択図】 図1
PROBLEM TO BE SOLVED: To provide a shape measuring device and a measuring method for measuring longitudinal/lateral sizes, squareness of four corners or the like of a square glass substrate used for a display substrate such as a large-size liquid crystal substrate or a plasma display substrate. SOLUTION: The device comprises: an imaging means comprising a light source for irradiating the glass substrate surface and a camera for imaging a domain irradiated by the light source, on a glass inspection stand supporting the glass substrate in the tilted attitude; a head moving means for moving a head having the imaging means in both directions of the XY axes; a head position detection means for detecting the XY coordinate of the head; an image processing device for processing the image of a glass substrate peripheral edge part imaged by the camera; and an operation processing device for operating and measuring the size and the squareness of the four corners of the glass substrate, or a pore position and/or a pore diameter in addition to the size and the squareness of the four corners of the glass substrate, from position information of the XY axes by the head position detection means and peripheral edge position coordinate information of a plurality of spots on the glass substrate calculated by the image processing device. COPYRIGHT: (C)2007,JPO&INPIT

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    US-9885934-B2February 06, 2018View, Inc.Portable defect mitigators for electrochromic windows
    WO-2013039915-A1March 21, 2013Soladigm, Inc.Portable defect mitigator for electrochromic windows
    WO-2014027375-A1February 20, 2014川崎重工業株式会社Unité de vérification de plaque de verre et équipement de fabrication